2 Aug 2011 00:35
MEMS Express from MNX
MEMS News <mems-news-owner <at> mems-exchange.org>
2011-08-01 22:35:43 GMT
2011-08-01 22:35:43 GMT
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Dear All, I am facing some some problems regarding the etching of nichrome, sputtered over SiO2 wafers and PDMS coated wafers. I am using H2O2: HCl:H2O :: 1:3:2 ratio as the etchant for the nichrome. Ideally, nichrome should get etched away from the samples in the unpatterned areas. However, sometimes it does so and sometimes there is no etching even after immersing in the etchant for a long duration. Even if I use a new etchant solution the problem still persists. I noticed this for both PDMS coated as well as SiO2 coated samples. Is there anything that probably initiates the etching in some samples / or is passivating my other samples? I even dried the un-etched samples and heated them and tried to etch once again. However neither of them etched, whereas this etchant works perfectly fine sometimes. I shall be highly obliged if anyone can kindly help me out with problem. Looking forward to your help. Thanks in advance Debashis Maji, IIT Kharagpur, India - 721302 _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk
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Hi, is there any metal can be electroplated or electroless plated on existed Cr thin layer? only directly on Cr, not addtional layer. Thanks - _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk
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....something that could be patterned to resolutions of 1 um or better. Also, the budget is not unlimited. thanks in advance m _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk
How thick? On Fri, Aug 5, 2011 at 2:14 AM, Ned Flanders <howdilydoo <at> gmail.com> wrote: > ....something that could be patterned to resolutions of 1 um or better. > Also, the budget is not unlimited. _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk
You can try using SU 8 2000.5 or 2002 and adjust you spin coat parameters in order to get 1 micron thickness. ________________________________ From: Ned Flanders <howdilydoo <at> gmail.com> To: General MEMS discussion <mems-talk <at> memsnet.org> Sent: Friday, August 5, 2011 2:14 AM Subject: [mems-talk] Recommend a negative resist ....something that could be patterned to resolutions of 1 um or better. Also, the budget is not unlimited. _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Also for 1 micron resolution, thick SU 8 resist will induce lot of stress in the film. Hence use a very thin SU 8 film may be upto 2 microns thick. ________________________________ From: gau s <gau_s15 <at> yahoo.com> To: "howdilydoo <at> gmail.com" <howdilydoo <at> gmail.com>; General MEMS discussion <mems-talk <at> memsnet.org> Sent: Friday, August 5, 2011 10:24 AM Subject: Re: [mems-talk] Recommend a negative resist You can try using SU 8 2000.5 or 2002 and adjust you spin coat parameters in order to get 1 micron thickness. _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk
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