Meng Gang | 4 Jan 02:44 2011

Wrinkle of PDMS mold

Dear all,

Do you have experience with soft PDMS mold?

Severe waveness exists on the surface of my PDMS mold. I tried to  
eliminate this phenomena by decreasing curing temperature from 120 
degree to 80 degree. But the wrinkling of PDMS still exits.
What is the possible reason? Surface tension of PDMS stamp? The 
influence of anti-stick layer or the improper treatment of molding process?

If you have any suggestions, please feel free to contact me. 

Thank you very much!

Sincerely,
Meng Gang
ISIR, Osaka University
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Tsoll Doiiu | 5 Jan 03:08 2011
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Re: Wrinkle of PDMS mold

Can not understand what is "wrinkling": do you mean the working side (that was in contact with master chip)
did not repeat the features of master mold?

Was the pdms hardened totally or not?

What is antistick layer? If it contains mercaptane, or chlorine, or cyane - it can be a reason of
non-hardened pdms.

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basar bolukbas | 5 Jan 13:51 2011
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Clean Room Management

Hi All,

Do know if there is a seminar or training program about ''Clean Room Management for semiconductor
microfabrication'' in Europe?

If so, could you please give me some information? (web page-mail address-etc)

Thank you. 

Best Regards.  		 	   		  
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Andrea Mazzolari | 5 Jan 18:02 2011
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diamond coating

Hi all,

i need to coat about 500nm of diamond on a silicon wafer, 4'' diameter.
I need to coat only 5 wafers. Is there someone who could provide this
service ? I may contact some companies but for sure they will not work on
so small quantities.

Best regards,
Andrea

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Andrea Mazzolari | 5 Jan 18:38 2011
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Cr/Au evaporation on diamond

Hi all,

i would need to evaporate 80nm of Au on a thin diamond layer.
Cr is tipically used as adhesion layer while evaporating Au on Silicon.

Is a Cr adhesion layer needed also to evaporate Au on diamond ?
In the case Cr will not adhere on diamond, which other adhesion layer
should be used ?

Best regards,
Andrea

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Ned Flanders | 5 Jan 21:28 2011
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Re: Cr/Au evaporation on diamond

I have never tried to sputter or evaporate Au on diamond or DLC, but
my guess is that Cr is your best bet, for 80 nm of gold. If Cr doesn't
work, another alternative which I know to work (and have used it) is
titanium-tungsten, W-10Ti. The former would allow for more regular
(uninterrupted, non-granular) layers, the latter probably better
adhesion.

An option I have not tried, but it is known to work, is pure titanium.

Finally, tantalum is reported as adhesion layer.

In any case, once you try depositing Au on diamond, please report
back, OK amigo?

m

On 1/5/11, Andrea Mazzolari <mazzolari <at> fe.infn.it> wrote:
> Hi all,
>
> i would need to evaporate 80nm of Au on a thin diamond layer.
> Cr is tipically used as adhesion layer while evaporating Au on Silicon.
>
> Is a Cr adhesion layer needed also to evaporate Au on diamond ?
> In the case Cr will not adhere on diamond, which other adhesion layer
> should be used ?
>
> Best regards,
> Andrea
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(Continue reading)

Ned Flanders | 5 Jan 21:33 2011
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Re: diamond coating

Andrea, you should know exactly what kind of diamond layer you need,
because there is a HUGE variety of these deposited diamond and
diamond-like carbon layers.

Do a bit of homework about this stuff before you start seriously
fishing around for a company or institution that will do "it" for you.
Not all of these layers will have the properties you want. Remember,
it's not all diamond that which shines... or something such :))))

m

On 1/5/11, Andrea Mazzolari <mazzolari <at> fe.infn.it> wrote:
> Hi all,
>
> i need to coat about 500nm of diamond on a silicon wafer, 4'' diameter.
> I need to coat only 5 wafers. Is there someone who could provide this
> service ? I may contact some companies but for sure they will not work on
> so small quantities.
>
> Best regards,
> Andrea
_______________________________________________
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provider of MEMS and Nanotechnology design and fabrication services.
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http://mail.mems-exchange.org/mailman/listinfo/mems-talk
(Continue reading)

Shay | 5 Jan 21:45 2011

Re: Cr/Au evaporation on diamond

Andrea,

Either Cr or Ti should work

Shay

-----Original Message-----
From: mems-talk-bounces+shay=mizur.com <at> memsnet.org
[mailto:mems-talk-bounces+shay=mizur.com <at> memsnet.org] On Behalf Of Andrea
Mazzolari
Sent: Wednesday, January 05, 2011 7:39 PM
To: mems-talk <at> memsnet.org
Subject: [mems-talk] Cr/Au evaporation on diamond

Hi all,

i would need to evaporate 80nm of Au on a thin diamond layer.
Cr is tipically used as adhesion layer while evaporating Au on Silicon.

Is a Cr adhesion layer needed also to evaporate Au on diamond ?
In the case Cr will not adhere on diamond, which other adhesion layer should
be used ?

Best regards,
Andrea

_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org
(Continue reading)

Cao, Zongliang | 5 Jan 22:51 2011
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Re: Cr/Au evaporation on diamond

Hi, Andrea

Both Ti and Cr work fine.
But based on my experience, Ti's adhesion to microcrystalline diamond is
better than Cr.

When I used Cr/Au as metal pads on my microcrystalline diamond sample, the
pads came off while I was doing wire bonding. However, Ti/Au turned out to
be totally fine.

I am not sure about other types of diamond.

On Wed, Jan 5, 2011 at 3:45 PM, Shay <shay <at> mizur.com> wrote:

> Andrea,
>
> Either Cr or Ti should work
>
> Shay

--

-- 
Zongliang Cao
Best Regards

Micro and Nano Technology Lab
Electrical and Computer Engineering
Michigan State University
East Lansing, MI 48824, USA
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(Continue reading)

Dheeraj singh | 6 Jan 19:04 2011
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defects in CBD synthesized thinfilms

I am working on Chemical Based Depositions of  thinfilms and trying to get
rid of voids and precipitates deposited on the seeded silicon substrate.
Can anyone suggest me few tips... I have tried annealing for better
charecterization of thinfilms. Is there any other process that i could try
to improve the charecterstics of the thinfilms. 

Please post your suggestion. It will be of great help to me.

Thanx
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Gmane