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Xin Liu | 1 Jun 2005 05:35
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RE: PDMS adhesion

Hi,
I don't know exactly the processes you described. But I know that PDMS will
swell in acetone. It might caused by the mechanical strain between PDMS and
your substrats.  

Xin Liu(Mr.)
Dalian Institute of Chemical Physics,
Chinese Academy of Sciences

-----Original Message-----
From: Yi Zhao [mailto:achelous <at> bu.edu] 
Subject: [mems-talk] PDMS adhesion

I found in my experiments that acetone is good to release bonded PDMS
surfaces. But I do not how it works. Does anyone have experience or can
provide some references what exactly acetone does to the interfacial
adhesion of PDMS? 
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Brian Dick | 1 Jun 2005 02:48

SU-8 adherence to silicon nitride

How well does SU-8 adhere to silicon nitride?  If not well, does anyone 
have suggests as to how to improve it?

Thanks,

Brian.
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Kamat Mahesh Keshav | 1 Jun 2005 02:49
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PDMS bonding to glass

Hi all,

Is it possible to bond PDMS to glass without using oxygen plasma method?
I mean ...is there another alternative?

Thanks
MK

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JBishop596 | 1 Jun 2005 04:12
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Polish Nickel Discs

Dear Members,

I am looking for a company to highly polish nickel discs? Can any one provide 
a reference?

Thank you.

John Bishop
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Shay Kaplan | 1 Jun 2005 07:56

RE: How to take a cross section SEM pictures?

It's better to freeze the samples in liquid nitrogen before cleaving -
otherwise the resist will smear. Even better to cover it with acrylic first
shay 

-----Original Message-----
From: Duan
Subject: Re: [mems-talk] How to take a cross section SEM pictures?

you can just cut it into small pieces, then you can do the side view under
sem.

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Russell Davies | 1 Jun 2005 11:52
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Photoresist for Silicon DRIE

Stephen,
The SPR220 series by Rohm & Haas offers very good selectivity. I have
had very good results etching trough >300um of silicon.

Regards,

Russell A Davies
Technical Sales Manager
Chestech Ltd
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Russell Davies | 1 Jun 2005 11:58
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Copper plating onto ceramic

Hi,
I'm trying to plate electroless copper onto ceramic (which I can do) but
the adhesion is not very good. Does anybody have any ideas of a good
pre-clean!

Thanks,
Russell

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Lee Pang | 1 Jun 2005 08:48
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RE: PDMS adhesion

Lee, J. N., Park, C. & Whitesides, G. M. Solvent compatibility of
poly(dimethylsiloxane)-based microfluidic devices. Analytical Chemistry
75, 6544-6554 (2003).

Lee Pang
wpang <at> ucsd.edu

-----Original Message-----
From: Alik Widge
Subject: Re: [mems-talk] PDMS adhesion

Acetone and many other organic solvents cause silicones to swell. (The 
physical mechanism has to do with changes in how the polymer chains pack

together depending on the polarity of the solvent.) As the PDMS changes 
size, it will increase the strain at the PDMS/silicon interface, causing
the film to peel off.

Note that this is why you should never wash a device in acetone if PDMS
is part of that device.
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Russell Davies | 1 Jun 2005 12:00
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BPR100 stripping

Hi,
You can use the BPR Photostripper from R&H (was Shipley) this works very
well & is a lot better than the old NMP based stripper.

Regards,

Russell A Davies
Technical Sales Manager
Chestech Ltd
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Martin.WALKER | 1 Jun 2005 12:24
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RIE of glass with SF6

Hi Alok, everyone

Etching glass can be a problem.  SF6 will etch silica or quartz, but most
glasses contain other oxides that are not so readily removed by fluorine
chemistry.  A few years ago, we did some work with Balzers (who make lots of
different types of glass) using CF3Cl, but this is not a very popular gas
now (being a CFC!).  If you want to etch most basic types of glass
(soda-lime, borosilicates, barosilicates etc.) then you need some chlorine
containing gases in with the fluorine based gases.  If you have a loadlocked
system, you can use Cl2, but I would not recommend this in an open load
system.
Often, it is useful to have some carbon present (i.e. use CHF3 or CF4) as
this will react with the oxygen and help to expose the other species on the
surface.  Also, CO2 is a bit more environmentally friendly (and does not
smell as bad) than SO2.

Regards,

Martin
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Gmane