Prem Pal | 3 Feb 2003 12:48
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nickel as a mask in EDP

Dear all
Can electroless or electroplated Nickel be used as a mask for 
anisotropic etching in EDP.any type of suggetion would be highly 
appreciated.
thanx

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keith.milner | 3 Feb 2003 14:13

polyurethane attachment


Hello,

i'm trying to attach a polyurethane disk to a steel substrate as part of some soft lithography work. I don't
want to use a polyurethane based adhesive. Anybody have any ideas?

Thanks for the help,

Keith Milner

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Dan.W.Chilcott | 3 Feb 2003 14:41

RE: nickel as a mask in EDP

Prem Pal-
I have used nickel for a mask in EDP and KOH.The nickel is not attacked
but at least in KOH an oxide was formed.If you need to remove the nickel
after the etch you may have a problem. I used sputtered nickel. 

Dan Chilcott

-----Original Message-----
From: Prem Pal [mailto:prem_iitd <at> rediffmail.com]
Sent: Monday, February 03, 2003 6:48 AM
To: mems-talk <at> memsnet.org
Subject: [mems-talk] nickel as a mask in EDP

Dear all
Can electroless or electroplated Nickel be used as a mask for 
anisotropic etching in EDP.any type of suggetion would be highly 
appreciated.
thanx

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options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
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Visit us at http://www.memsnet.org/

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(Continue reading)

Shane Jones | 3 Feb 2003 15:49

Re: thick polyimide film on glass

Hi Alex:

On the surface, this seems to be something that we could do.  We provide contract services for the
development of MEMS, flat panel displays, sensors, and other specialty applications.  Some of the
services we provide are:

coating services
low volume production
prototyping
photolithography services
metal etch services
glass scribe services
engineering
process/product development

Please feel free to visit our web site at

 www.brewerscience.com/smproducts/sm_custom_coating.html

Best Regards,
Shane

Alex Pozdin wrote:

> Hello, MEMS Community!
> I am looking for the vendor who can coat our borosilicate glass substrates 10X10" with polyimide material
75um thick polyimide material. Desired thickness variation is less than 10um. Smaller size substrates
can be considered for initial testing.
> Regards,
> Alex Pozdin,
(Continue reading)

kawang | 3 Feb 2003 16:05
Picon

Adhesion of parylene to electrodes

Hi. We are studying DEP microfluidics at the University of
Rochester. We are working on an experiment to observe the behavior of
water actuated over two nearly parallel vertical electrodes coated with
parylene. However, there have been some problems with the adhesion of
parylene to steel electrodes.

1. We know the roughness of electrodes will affect the adhesion, but we
don't know how smooth we should polish the electrodes, and what steps of
cleaning or drying should be performed.

2. We are ready to try A-174 silane as a adhesion promoter, but we don't
know some treatment details, for example, how long should the electrodes
be kept in the solution, how much time can lapse between applying the
adhesion promoter and the parylene coating treatment.
Does anybody know something about the above questions or other better
methods?

We appreciate your suggestion and help!

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kirt_williams | 3 Feb 2003 17:41
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RE: nickel as a mask in EDP

> -----Original Message-----
> From: Prem Pal [mailto:prem_iitd <at> rediffmail.com]
> Sent: Monday, February 03, 2003 3:48 AM
> To: mems-talk <at> memsnet.org
> Subject: [mems-talk] nickel as a mask in EDP
> 
> 
> Dear all
> Can electroless or electroplated Nickel be used as a mask for 
> anisotropic etching in EDP.any type of suggetion would be highly 
> appreciated.
> thanx

In our tests, evaporated nickel (with a chromium adhesion layer)
was not etched at all in KOH. EDP tends to be a little less aggressive
and probably will not etch the nickel, either. 

	--Kirt Williams	Agilent Technologies

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Tom Hodge | 3 Feb 2003 17:09

RE: thick polyimide film on glass

You may want to try HTE Labs   http://www.htelabs.com/

Regards, 

Tom

-----Original Message-----
From: Alex Pozdin [mailto:apozdin <at> laserusa.com]
Sent: Friday, January 31, 2003 8:18 AM
To: MEMC chat
Subject: [mems-talk] thick polyimide film on glass

Hello, MEMS Community!
I am looking for the vendor who can coat our borosilicate glass substrates
10X10" with polyimide material 75um thick polyimide material. Desired
thickness variation is less than 10um. Smaller size substrates can be
considered for initial testing.
Regards,
Alex Pozdin,
Director of Engineering
5 Danuser Dr.
Hermann, MO 65041 USA
ph. 573-486-5500
e-mail: apozdin <at> laserusa.com 
fax 573-486-5540

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(Continue reading)

Rahul Agarwal | 3 Feb 2003 18:18

electrodepositable photoresist

Hi,
is any one familiar with the electrodepositable photoresist. Shipley makes
electroplatable photoresist named PEPR 2400. Does any one has any kind of
experience with it. I want to Plate this photoresist in the deep trenches in
silicon wafer.
Any sort of feedback is appreciated.
Thanks
Rahul agarwal
University of South Florida
Electrical Engineering Dept.
Micro Electro Mechanical systems Lab.

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Michael D Martin | 3 Feb 2003 18:31
Picon
Favicon

Re: thick polyimide film on glass

You can buy polyimide 75 microns thick with an adhesive on one side from
Dupont. 

-Mike 

>>> apozdin <at> laserusa.com 01/31/03 08:17AM >>>
Hello, MEMS Community!
I am looking for the vendor who can coat our borosilicate glass
substrates 10X10" with polyimide material 75um thick polyimide material.
Desired thickness variation is less than 10um. Smaller size substrates
can be considered for initial testing.
Regards,
Alex Pozdin,
Director of Engineering
5 Danuser Dr.
Hermann, MO 65041 USA
ph. 573-486-5500
e-mail: apozdin <at> laserusa.com 
fax 573-486-5540

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MEMS-talk <at> memsnet.org mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk

Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/

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options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
(Continue reading)

Baoping Guo | 3 Feb 2003 18:43

Etch Mask

Dear all

I am trying to find solution for protecting device etching with TMAH.  How to design the etch mask? Any type of
suggestion highly appreciate. 

Baoping

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Gmane