Tong Chen | 28 Aug 16:37 2014
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[mems-talk] Deposition electrode on PMMA

Hello everyone,

we want to deposit metal electrodes (~5um) on PMMA, does anybody have some suggestions?

Thanks very much

Tong

Postdoc
Microfluidics and BioChip Lab
E2-4403
Department of Mechanical and Mechatronics Engineering
University of Waterloo
200 University Ave West, Waterloo, Ontario, N2L 3G1
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MEMS News | 27 Aug 21:22 2014

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Beyond GPS: Five Next-Generation Technologies for Positioning, Navigation ... Microtechnology for Positioning, Navigation, and Timing (Micro-PNT) leverages extreme miniaturization made possible by DARPA-developed micro-electromechanical systems (MEMS) technology. Micro-PNT comprises a portfolio of diverse efforts collectively ...
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Broadcom's WICED dev kit makes it easy to prototype new Internet of things ... Broadcom's own chip for this WICED-based platform includes Bluetooth Smart connectivity (a low-power version of the short-range wireless connection protocol), and five different low-power motion sensors (micro-electro mechanical systems MEMS).
today VentureBeat - MEMS technology
New insights into 'switchable water' have implications for water purification ... The microfluidics approach allowed the researchers to take a more in-depth look at the water switching process. The particular process they analyzed begins with the introduction of CO2 bubbles into a solution of water containing a nitrogenous base (for ...
yesterday Phys.Org - MEMS technology
IFTLE 206 COSMOS and DAHI Herald the Era of 3D Heterogeneous Integration The glass carrier containing the singulated InP chiplets is then aligned to the CMOS wafer, and the bonding operation performed using standard wafer bonding equipment with controlled time, temperature, and bonding force. The glass carrier wafer is then ...
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High Accuracy Integrated Inertial Pedometer for Precise Personal Navigation Nevertheless, system accuracy and prohibitive prices can be overcome by using advanced micro- electromechanical systems (MEMS). Purdue engineers have selected MicroStrain's 3DM-GX2 inertial sensor to design their own virtual pedometer. This sensor ...
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Emerging medical LSR molding technology enables single-step process ... The research team has built a variable test mold for an ultra-small injection molding machine to investigate micro-scale LSR processing using PIT. The use of various inserts ensures that parts with outer diameters between 1 and 4 mm can be tested.
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MEMS News | 26 Aug 21:25 2014

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New insights into 'switchable water' have implications for water purification ... The microfluidics approach allowed the researchers to take a more in-depth look at the water switching process. The particular process they analyzed begins with the introduction of CO2 bubbles into a solution of water containing a nitrogenous base (for ...
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Sajeesh P | 25 Aug 13:54 2014
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[mems-talk] Coating problem of su8 10 over the silicon wafer

Hi

We are trying to coat su8 10 over the silicon wafer for a thickness of
resist 20 um. The protocol specified by Micro chem is followed for this
thickness.Spin speed of 1590 rpm with acceleration of 300 rpm and 30
seconds. The problem is, after coating the Su8 over the wafer, suddenly
resist form islands over the wafer (resist balling up and leaving small
empty pores). Thus the channels of 10 um is not possible to form.

We also tried to coat an HMDS coating to improve the adhesion. But the
balling up effect increased. Instead of small diameter pores, It form large
diameter vacant spaces.

We done an HF dip (1: 5 ratio) before the coating of su8 and dehydration of
wafer with 150 C at about 10 minutes.Is it problem of lack of cleaning of
wafer. Any other cleaning procedure should follow for this?

Please suggest me some remedy for this

--

-- 
Sajeesh P
Mechanical Engineering Dept
IIT Madras
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MEMS News | 25 Aug 20:48 2014

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MEMS News | 21 Aug 22:39 2014

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MEMS News | 20 Aug 22:31 2014

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Estoril, Portugal
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MEMS News | 19 Aug 23:38 2014

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Graphene-based planar micro-supercapacitors for on-chip energy storage ... the development of supercapacitors; they also review representative graphene-based materials (graphene sheets, graphene quantum dots and graphene hybrids) used to manufacture MSCs, typical microfabrication strategies (photolithography techniques, ...
2014-08-17 Space Daily - MEMS technology
A Better Motion Sensor Mike Rosa, a project manager for microelectromechanical systems at Applied Materials, says others are interested in integrated, single-chip accelerometers. Rosa says his company, which makes manufacturing equipment for rival electronics producers, is ...
yesterday MIT Technology Review (blog) - MEMS technology
Multilayer silicene proves stable in air "The key result of this research is that we can manage multilayer silicene outside an ultrahigh vacuum – at least for 24 h, which is largely long enough to perform any industrial microelectronic process, or physical measurements," explains Paola De ...
yesterday nanotechweb.org - MEMS technology
Your smartphone's gyroscope can be turned into an eavesdropping hacker's ... According to the paper, microelectromechanical systems (MEMS) gyroscopes found in modern smartphones are sensitive enough to pick up acoustic signals. While these raw signals aren't enough to glean useful information from, the researchers used signal ...
2014-08-16 Digital Trends - MEMS technology

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iPhone 6 sales in Taiwan expected to beat estima tes Ambit Microsystems Corp, a subsidiary of Apple's contract manufacturer Hon Hai Precision Industry (Foxconn), is planning to do the same but its 700MHz spectrum may not support the iPhone 6, which is said to adopt the 900/1800MHz spectrum. The new ...
today WantChinaTimes - MEMS business
'Industry 4.0' and the next wave of embedded machines In other words, vital micro machine data gets aggregated into a valuable macro view of a facility. I think of IoT in industry as plug-and-play meets industrial machines. When a new piece of equipment is installed, it presents itself to the control ...
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today nanotechweb.org - Nanotechnology
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2014-08-15 Phys.Org - Nanotechnology
Scientists create remote-controlled nanoscale protein motors “Biology is full of these nanoscale machines that can perform complex tasks,” said Zev Bryant, PhD, assistant professor of bioengineering. “We want to understand how they can convert chemical energy into mechanical work and perform their specific tasks ...
2014-08-15 Stanford Medical Center Report - Nanotechnology
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MEMS Technology Showcase 2014-11-05 - 2014-11-07
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3D Architectures for Semiconductor Integration and Packaging
ICMEMSS 2014 2014-12-18 - 2014-12-20
Indian Institute of Technology Madras, Chennai, INDIA
International Conference on MEMS and Sensors
The 28th International Conference on Micro Electro Mechanical Systems 2015-01-18 - 2015-01-22
Estoril, Portugal
NANOSMAT-Asia 2015 Conference 2015-03-24 - 2015-03-27
Kayseri, Turkey
The 2nd International Conference on Surfaces, Coatings and Nanostructured Materials
Automotive Sensors and Electronics Expo 2015 2015-05-20
Detroit, MIchigan
Annual Conference and Exhibition
Transducers 2015 2015-06-21 - 2015-06-25
Anchorage, Alaska

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MEMS News | 13 Aug 21:36 2014

MEMS Express from MNX

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MEMS technology

Graphene-based planar micro-supercapacitors for on-chip energy storage ... the development of supercapacitors; they also review representative graphene-based materials (graphene sheets, graphene quantum dots and graphene hybrids) used to manufacture MSCs, typical microfabrication strategies (photolithography techniques, ...
yesterday ECNmag.com - MEMS technology
Surface engineering - Diamonds in the crush These features, which are desirable in abrasive environments, have led to the widespread adoption of DLC films in microelectromechanical systems, such as hard disk drives. But because these coatings contain amorphous carbon atoms that produce rough, ...
today Nanowerk - MEMS technology

MEMS business

Freescale's 2 Billionth MEMS/Sensor | EE Times Freescale ships its 2 billionth MEMS/sensor and celebrates by recounting its accomplishments in a slideshow.
R. Colin Johnson yesterday - MEMS business
Unique MEMS-based tracking tag from Bluechiip and STMicroelectronics steps ... Global semiconductor leader STMicroelectronics Pty Ltd and Australian technology company, Bluechiip Limited announce the high-volume production of their jointly developed, unique MEMS-based tracking tags, with the ability to meet annual demand in ...
yesterday Ferret - MEMS business

Nanotechnology

Theoretical simulations reveal how nanoscale lubricating systems can ease ... By performing atom-level simulations of nanoscale friction, Ling Dai and co-workers from the A*STAR Institute of High Performance Computing in Singapore have now uncovered critical clues for designing better systems to lubricate and protect DLC coatings.
today Phys.Org - Nanotechnology
Is gold nanotechnology the key to fighting Ebola? As the World Health Organization holds crisis meetings to discuss ways to battle the Ebola outbreak, one scientist thinks that one solution for fighting the deadly virus is nanotechnology. The research is being led by Thomas Webster of Northeastern ...
yesterday DigitalJournal.com - Nanotechnology

Nanotech business

Nanoscale Material Researcher Named Finalist for Blavatnik Awards for Young ... He was offered an opportunity to do research under Pamela Norris, Frederick Tracy Morse Professor of Mechanical and Aerospace Engineering, whose lab was looking at heat transfer on the nanoscale and its blend with quantum mechanics. He continued in ...
today AZoNano.com - Nanotech business

Featured Event

Attend this event to identify emerging technology and application trends, exchange ideas, form new companies and network with your industry peers!

Event Calendar

Machine 2 Machine Evolution Conference & Expo 2014-08-11 - 2014-08-14
Las Vegas, NV
M2M & IoT Strategies You Can Implement Today
MEMS Industry Group Conference Shanghai 2014-09-11 - 2014-09-12
Shanghai, China
MIG's Asian-focused business conference
COMS Conference and nanoUtah 2014 2014-10-12 - 2014-10-15
Salt Lake City, Utah
Commercialization of Micro, Nano and Emerging Technologies Conference
MicroTAS 2014 2014-10-26 - 2014-10-30
San Antonio, TX
Elevator Pitch Session 2014-11-05 - 2014-11-07
Scottsdale, AZ
MEMS Technology Showcase 2014-11-05 - 2014-11-07
Scottsdale, AZ
MIG is looking for the coolest MEMS- and sensors-enabled products of the year!
AVS 61st International Symposium and Exhibition 2014-11-09 - 2014-11-14
Baltimore, MD
Science and Technology of Materials, Interfaces, and Processing
TSensors Summit 2014 - US 2014-11-12 - 2014-11-13
San Diego, CA
Wearable Sensors and Electronics 2014 2014-11-12 - 2014-11-13
Santa Clara, California
Inaugural Conference and Exhibition
3D ASIP 2014 2014-12-10 - 2014-12-12
Burlingame, CA
3D Architectures for Semiconductor Integration and Packaging
ICMEMSS 2014 2014-12-18 - 2014-12-20
Indian Institute of Technology Madras, Chennai, INDIA
International Conference on MEMS and Sensors
The 28th International Conference on Micro Electro Mechanical Systems 2015-01-18 - 2015-01-22
Estoril, Portugal
NANOSMAT-Asia 2015 Conference 2015-03-24 - 2015-03-27
Kayseri, Turkey
The 2nd International Conference on Surfaces, Coatings and Nanostructured Materials
Automotive Sensors and Electronics Expo 2015 2015-05-21
Detroit, MIchigan
Annual Conference and Exhibition
Transducers 2015 2015-06-21 - 2015-06-25
Anchorage, Alaska

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MEMS News | 12 Aug 22:21 2014

MEMS Express from MNX

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MEMS technology

New Microfabrication Technology for Producing Sensing ... Researchers at Arizona State University have developed a novel microfabrication process that produces MET sensing elements with more uniformity between electrode layers and enhances control over the device's size.
Bill Loux, Arizona State University (AzTE) 2014-08-09 - MEMS technology
DARPA/IBM Create TrueNorth 'Brain' Chip IBM researchers have been researching a way to bring the power of the human brain to a computer processor for a number of years now. The TrueNorth project has just reached a rather significant achievement towards reaching their goal. The IBM Research ...
2014-08-10 FileHippo News - MEMS technology
Graphene-based planar micro-supercapacitors for on-chip energy storage (Nanowerk News) The rapid development of miniaturized portable electronic devices, such as micro-electromechanical systems, microrobots and implantable medical devices, has stimulated intense demand for micro-scale power sources. Although ...
today Nanowerk - MEMS technology
PARC: 3D Printing Electronic Components Within Objects ... processors and memory, or sensors based on microelectromechanical devices, or MEMS. They'd all become feedstocks for a palette of chip-infused inks. Existing electronics-printing systems generally use lower-performance materials, but “potentially ...
yesterday PCBDesign007 - MEMS technology
Intel Discloses Newest Microarchitecture and 14 Nanometer ... Intel today disclosed details of its newest microarchitecture that is optimized with Intel's industry-leading 14nm manufacturing process. Together these technologies will provide high-performance and low-power capabilities to serve a broad array of computing needs and products from the infrastructure of cloud computing and the Internet of Things to personal and mobile computing.
today - MEMS technology
Bluechiip and ST transition to full-scale production of MEMS-based tracking tag AUSTRALIAN technology company Bluechiip, along with STMicroelectronics, have transitioned to full-scale production of their MEMS-based tracking tag. The unique tracking tag was jointly developed by the two companies, and the transition to high volume ...
today Ferret - MEMS technology
New Micro Machine Inside Body to Produce Insulin; Revolutionize Diabetes ... In a move that can change and perhaps upset many pharmaceutical indsutries across the world, a group of ETH Zurich researchers from the Biosystems Science and Engineering (D-BSSE) department in Basel have developed a micro machine that can be ...
today Microfinance Monitor - MEMS technology
Robotic Telescope Captures Clear Images of Exoplanet Stars Then, they took the starlight that entered the telescope and bounced it off a tiny micro-electromechanical deformable mirror. Using the previous laser measurements as a benchmark, they deformed the surface of the mirror so that it cancelled out the ...
yesterday IEEE Spectrum - MEMS technology
Lasers for 3D Printing: Additive manufacturing with NIR lasers forms micro ... The company has since developed 3D multiphoton lithography systems such as the Photonic Professional GT, a microprinter for fabrication of 3D microstructures and nanostructures used in photonics, microfluidics, micro-optics, rapid prototyping, and life ...
2014-08-08 Laser Focus world - MEMS technology
LORD MicroStrain Offers GPS/INS High-Performance MEMS The 3DM-GX4-45 by LORD MicroStrain is a miniature, industrial-grade GPS-aided inertial navigation system that uses high-performance MEMS sensor technology. It combines a triaxial accelerometer, triaxial gyro, triaxial magnetometer, temperature sensors, ...
yesterday GPS World magazine - MEMS technology

MEMS business

MEMS sound great, but can it last? The MEMS (microelectromechanical system) market is starting to motor. It grew at just over 10% last year and is likely to grow even faster this year. This is good news for the 'newest' semiconductor device market. But can it continue to grow at this rate?
yesterday ElectronicsWeekly.com - MEMS business
Mitsubishi launches bonding services using proprietary room-temperature wafer ... In respondse to external demand, Tokyo-based machinery manufacturer Mitsubishi Heavy Industries Ltd (MHI) has launched wafer bonding services using its wafer bonding systems, which have been developed in-house and are capable of bonding different ...
yesterday Semiconductor Today - MEMS business
Tech Companies Announce Merger Orbotech Ltd. has closed its acquisition of SPTS Technologies Group Ltd., in a strategic move into the high growth areas of Advanced Packaging and micro-electro-mechanical systems (MEMS). Orbotech financed the acquisition, announced on July 7, 2014, ...
2014-08-08 Controlled Environments Magazine - MEMS business
UC Riverside-led team granted $1.7m to study van der Waals ultra-thin-film ... Three University of California, Riverside researchers are part of team recently awarded a grant of almost $1.7m from the US National Science Foundation (NSF) to characterize, analyze and synthesize a new class of ultra-thin-film materials that could ...
yesterday Semiconductor Today - MEMS business

Nanotechnology

Bee, scorpion and snake venom may hold cancer cure Pan's technique uses nanotechnology to deliver a synthesized element similar to the venom found in bees, snakes and scorpions. Ancient texts show doctors have used venom to treat aliments for years. In 14 BC, the Greek writer Pliny the Elder described ...
today CNN - Nanotechnology
Attack Ebola on a nanoscale (Nanowerk News) The Ebola virus outbreak in West Africa has claimed more than 900 lives since February and has infected thousands more. Countries such as Nigeria and Liberia have declared health emergencies, while the World Health Organization ...
today Nanowerk - Nanotechnology

Featured Event

The 18th International Conference on Miniaturized Systems for Chemistry and Life Sciences.
Abstract Submission Deadline April 15, 2014

Event Calendar

Machine 2 Machine Evolution Conference & Expo 2014-08-11 - 2014-08-14
Las Vegas, NV
M2M & IoT Strategies You Can Implement Today
MEMS Industry Group Conference Shanghai 2014-09-11 - 2014-09-12
Shanghai, China
MIG's Asian-focused business conference
COMS Conference and nanoUtah 2014 2014-10-12 - 2014-10-15
Salt Lake City, Utah
Commercialization of Micro, Nano and Emerging Technologies Conference
MicroTAS 2014 2014-10-26 - 2014-10-30
San Antonio, TX
Elevator Pitch Session 2014-11-05 - 2014-11-07
Scottsdale, AZ
MEMS Technology Showcase 2014-11-05 - 2014-11-07
Scottsdale, AZ
MIG is looking for the coolest MEMS- and sensors-enabled products of the year!
AVS 61st International Symposium and Exhibition 2014-11-09 - 2014-11-14
Baltimore, MD
Science and Technology of Materials, Interfaces, and Processing
TSensors Summit 2014 - US 2014-11-12 - 2014-11-13
San Diego, CA
Wearable Sensors and Electronics 2014 2014-11-12 - 2014-11-13
Santa Clara, California
Inaugural Conference and Exhibition
3D ASIP 2014 2014-12-10 - 2014-12-12
Burlingame, CA
3D Architectures for Semiconductor Integration and Packaging
ICMEMSS 2014 2014-12-18 - 2014-12-20
Indian Institute of Technology Madras, Chennai, INDIA
International Conference on MEMS and Sensors
The 28th International Conference on Micro Electro Mechanical Systems 2015-01-18 - 2015-01-22
Estoril, Portugal
NANOSMAT-Asia 2015 Conference 2015-03-24 - 2015-03-27
Kayseri, Turkey
The 2nd International Conference on Surfaces, Coatings and Nanostructured Materials
Transducers 2015 2015-06-21 - 2015-06-25
Anchorage, Alaska

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MEMS News | 8 Aug 00:14 2014

MEMS Express from MNX

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MEMS technology

Portable Retina Scanner Could Protect Your Identity on the Go Overall, the scanner's silicon-based microelectronic components are tiny — about as small as microchips, the researchers said. The scanner's built-in optical instruments capture an image of the retina from laser beams that are deflected by the scanner ...
today LiveScience.com - MEMS technology
Examining Small Sample Areas Using Micro X-ray Fluorescence (µXRF) The characteristic spatial resolution of the traditional XRF has a diameter range of several millimeters to several hundred micrometers. However, µXRF allows analyzing the micro-scale features on the sample using X-ray optics, which limits the size of ...
yesterday Azom.com - MEMS technology
Sweat Sensors Sniff Out Fatigue, Stress, Even Fear “We're actually utilizing expertise in microfluidics that we typically apply to manipulate and improve the airflow and efficiency of our aircraft engines to direct the sweat over the sensor ever so precisely,” Alizadeh wrote on her blog. “We create ...
today Product Design & Development - MEMS technology
Novel adaptive laser measurement techniques The adaptive optics we use are based on a low-order distortion correction system, which consists of a Hartmann-Shack camera, a PC, and a Flexible Optical B.V. OKOTech microelectromechanical system (MEMS) light modulator. This modulator is constructed ...
today SPIE Newsroom - MEMS technology
New methods needed to manufacture soft machines, robots “Our process enables digital fabrication of the sensors on the micro-scale. While this is a huge step forward, we need to continue to decrease scale and increase density to develop sensors and electronics that are comparable to traditional, rigid ...
yesterday Today's Medical Developments - MEMS technology

MEMS business

NJR and UMC Extends Collaboration to MEMS Microphone Manufacturing ... successfully collaborated to achieve high-volume manufacturing for NJR's MEMS (micro electro mechanical system) microphone products. Adding UMC's MEMS manufacturing capabilities to NJR's Fukuoka and Kawagoe fabs will ensure NJR's smooth and ...
yesterday MarketWatch - MEMS business
Orbotech Announces Closing of the Acquisition of SPTS Technologies ... today announced that it has successfully closed the previously-announced acquisition of SPTS Technologies Group Limited ("SPTS"), in a strategic move into the high growth areas of Advanced Packaging and micro-electro-mechanical systems (MEMS).
today Wall Street Journal - MEMS business

Nanotechnology

Nanoscale anti-counterfeiting tech reveals hidden image when breathed upon Allowing consumers to identify counterfeit goods is a tricky and expensive problem, as many security measures such as holograms might be easily mimicked by counterfeiters. A new nanoscale printing technique, however, allows researchers to create labels ...
today Gizmag - Nanotechnology

Featured Event

Due to high demand, Wearable Sensors and Electronics 2014 has been expanded to two days!

Event Calendar

Machine 2 Machine Evolution Conference & Expo 2014-08-11 - 2014-08-14
Las Vegas, NV
M2M & IoT Strategies You Can Implement Today
MEMS Industry Group Conference Shanghai 2014-09-11 - 2014-09-12
Shanghai, China
MIG's Asian-focused business conference
COMS Conference and nanoUtah 2014 2014-10-12 - 2014-10-15
Salt Lake City, Utah
Commercialization of Micro, Nano and Emerging Technologies Conference
MicroTAS 2014 2014-10-26 - 2014-10-30
San Antonio, TX
Elevator Pitch Session 2014-11-05 - 2014-11-07
Scottsdale, AZ
MEMS Technology Showcase 2014-11-05 - 2014-11-07
Scottsdale, AZ
MIG is looking for the coolest MEMS- and sensors-enabled products of the year!
AVS 61st International Symposium and Exhibition 2014-11-09 - 2014-11-14
Baltimore, MD
Science and Technology of Materials, Interfaces, and Processing
TSensors Summit 2014 - US 2014-11-12 - 2014-11-13
San Diego, CA
Wearable Sensors and Electronics 2014 2014-11-12 - 2014-11-13
Santa Clara, California
Inaugural Conference and Exhibition
3D ASIP 2014 2014-12-10 - 2014-12-12
Burlingame, CA
3D Architectures for Semiconductor Integration and Packaging
ICMEMSS 2014 2014-12-18 - 2014-12-20
Indian Institute of Technology Madras, Chennai, INDIA
International Conference on MEMS and Sensors
The 28th International Conference on Micro Electro Mechanical Systems 2015-01-18 - 2015-01-22
Estoril, Portugal
NANOSMAT-Asia 2015 Conference 2015-03-24 - 2015-03-27
Kayseri, Turkey
The 2nd International Conference on Surfaces, Coatings and Nanostructured Materials
Transducers 2015 2015-06-21 - 2015-06-25
Anchorage, Alaska

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MEMS & Nanotechnology Exchange     About Us


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